-50% discount* If you buy the same UNE standard in different languages. * Discount on the lower pvp.

EN ISO 14644-13:2026

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO 14644-13:2026)

Edition date: 2026-03-11
In Force
Available languages: French, English
Summary: This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels. The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10. The document gives general guidance on the following: expected surface cleanliness levels; suitability of cleaning methods; compatibility of surfaces with the cleaning technique; assessment of cleaning appropriateness. The following are excluded from this document: classification of cleaning methods; product produced within a cleanroom; specific surface-related cleaning methods; detailed description of cleaning mechanisms, methods and procedures of various cleaning methods; detailed material characteristics; description of damage mechanisms by cleaning processes and time-dependent effects; references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent; other characteristics of particles such as electrostatic charge, ionic charges, etc.; chemical reactions between molecular contaminants and surfaces; microbiological aspects of surface cleanliness; radioactive aspects of contamination; health and safety considerations; environmental aspects such as waste disposal, emissions, etc.; selection and use of statistical methods.

Le présent document donne des lignes directrices concernant le nettoyage, jusqu’à atteindre un degré de nettoyage spécifié, des surfaces d’une salle propre ainsi que des surfaces des équipements et des matériaux contenus dans une salle propre. Toutes les surfaces d’intérêt (internes ou externes) sont concernées par le présent document. Il fournit des recommandations concernant l’évaluation des méthodes de nettoyage en vue d’obtenir les niveaux de gradation exigés de propreté particulaire des surfaces (SCP) et de propreté chimique des surfaces (SCC) ainsi que les techniques qu’il convient d’utiliser pour atteindre ces niveaux spécifiés. L’adéquation des techniques de nettoyage fera référence aux niveaux de gradation de la propreté et aux méthodes d’essai associées disponibles dans l’ISO 14644-9 et l’ISO 14644-10. Le document donne des recommandations générales sur les points suivants: niveaux de gradation de la propreté des surfaces souhaités; pertinence des méthodes de nettoyage; compatibilité des surfaces avec la technique de nettoyage; évaluation de l’adéquation du nettoyage. Les points suivants ne seront pas traités dans le présent document: classification des méthodes de nettoyage; produits fabriqués dans une salle propre; méthodes de nettoyage spécifiques en lien avec une surface; description détaillée des mécanismes de nettoyage, méthodes et modes opératoires de diverses méthodes de nettoyage; caractéristiques détaillées des matériaux; description des mécanismes de détérioration dus aux procédés de nettoyage et effets dans le temps; références aux forces de liaison entre les contaminants et les surfaces, ou aux processus de génération qui dépendent généralement du temps et du procédé; autres caractéristiques des particules, telles que la charge électrostatique, les charges ioniques, etc.; réactions chimiques entre les contaminants moléculaires et les surfaces; aspects microbiologiques de la propreté des surfaces; aspects radioactifs de la contamination; considérations relatives à la santé et la sécurité; aspects environnementaux tels que l’élimination des déchets, les émissions, etc.; sélection et utilisation de méthodes statistiques.

Dieses Dokument gibt Richtlinien zur Reinigung von Reinraumoberflächen, Oberflächen der Ausrüstung in einem Reinraum und Oberflächen von Materialien in einem Reinraum bis zu einem festgelegten Grad. Berücksichtigt werden alle relevanten Oberflächen (extern oder intern). Es gibt Anleitungen zur Bewertung von Reinigungsverfahren zum Erreichen der geforderten Stufen der partikulären Oberflächenreinheit (en: surface cleanliness by particle concentration, SCP) und der chemischen Oberflächenreinheit (en: surface cleanliness by chemical concentration, SCC) und in Bezug darauf, welche Techniken zum Erreichen dieser festgelegten Grade berücksichtigt werden sollten. Bei der Eignung von Reinigungstechniken wird auf die Reinheitsstufen und die damit verbundenen Prüfverfahren aus ISO 14644 9 und ISO 14644 10 verwiesen. Dieses Dokument gibt allgemeine Anleitungen zu Folgendem:  die erwarteten Oberflächenreinheitsgrade;  die Eignung der Reinigungsverfahren;  die Kompatibilität von Oberflächen mit der Reinigungstechnik;  die Bewertung der Eignung für die Reinigung. Das Folgende wird in diesem Dokument nicht berücksichtigt:  die Klassifizierung von Reinigungsverfahren;  das innerhalb eines Reinraums hergestellte Produkt;  die spezifische Oberfläche in Bezug auf die Reinigungsverfahren;  die detaillierte Beschreibung von Reinigungsmechanismen, -verfahren sowie Verfahrensweisen von verschiedenen Reinigungsverfahren;  die detaillierten Materialkenngrößen;  die Beschreibung von Mechanismen hinsichtlich Schäden durch die Reinigungsprozesse und zeitabhängigen Auswirkungen;  Verweisungen auf interaktive Bindungskräfte zwischen den Kontaminanten und Oberflächen oder Generierungsprozesse, die üblicherweise zeit- und prozessabhängig sind;  weitere Kenngrößen von Partikeln, beispielsweise elektrostatische Ladung, Ionenladungen usw.;  die chemischen Reaktionen zwischen molekularen Kontaminanten und Oberflächen;  die mikrobiologischen Aspekte der Oberflächenreinheit;  die radioaktiven Aspekte der Kontamination;  die Aspekte des Gesundheitsschutzes und der Arbeitssicherheit;  die Umweltaspekte, beispielsweise Abfallentsorgung, Emissionen usw.;  die Auswahl und Anwendung von statistischen Verfahren.
ICS: 13.040.35-Cleanrooms and associated controlled environments
CTN: CEN/TC 243 - 6224

Otras Relaciones

Acuerdo de Viena ISO 14644-13:2026

Reemplazo Normas

Reemplaza a EN ISO 14644-13:2017

The book in the author's words

Ultricies magna feugiat malesuada sociosqu varius vivamus cubilia parturient, himenaeos vitae vehicula nam placerat netus urna platea, nostra rutrum felis mattis penatibus velit quisque.
Frequently Asked Questions Do you have any questions about our products?
  • Standards UNE, EN, ISO, IEC, BSI, DIN, ASTM, AFNOR, IEEE, SAE
  • In addition, you can request the rules of the rest of the organizations through the e-mail normas@aenor.com
  • Technical books on paper and in electronic format (PDF, epub).

The standards can be purchased in PDF, reading or paper. The reading standards are not download files, they can only be viewed in the client area. The standards ordered on paper and some of the books in the catalogue are printed on demand. 

Check deadlines in normas@aenor.com.

The license of use is for one user and one device, if you want to reproduce the content of the standard, you must request a license that will have an additional cost. Send us your inquiry here 

 

The use of standards and other content protected by intellectual property rights in AI systems is prohibited. If you are interested in such uses, please contact normas@aenor.com. Failure to comply will result in the withdrawal of your Access licence.

The AENOR standards and books that appear in the online store can only be purchased exclusively through the website. AENOR does not have a physical store.

Purchase procedure: by clicking on "Buy" the desired products will go to the shopping cart. If there are display problems, the recommended browser is Chrome.

To formalize the purchase you must access the customer area. If you are not registered as a customer, you must fill in a form with the data along with a password and username. This will create the account.

Once the "Customer data" form has been completed, "Order in progress" will be displayed with all the items loaded in the shopping cart, their prices, taxes established in current legislation and shipping costs if applicable.

The prices of the standards and books that appear in the various sections do not include taxes or shipping costs.

AENOR promotional codes consist of alphanumeric characters and can only be applied to online purchases, received through a specific offer and for a limited time. To apply your promotional code, you just have to enter it in step 2 of 4 of the purchase process on the website and click on "apply", after you have identified yourself and chosen the payment methods. Promo codes are not cumulative.

 

  • Credit or debit card (Visa, Mastercard) and PayPal.
  • Bank transfer. If you opt for this form of payment, you must first send AENOR a copy of the transfer by email to normas@aenor.com
  • The purchase invoice can be downloaded from the customer area, in my previous orders

In the case of clients of companies based abroad, the taxpayer identification number of the corresponding country (for example, in Argentina the CUIT), must be filled in the CIF/NIF - VAT field .

  • Direct download via the website in the Customer Area. In the customer area, which can only be accessed with a password and username, the products purchased will be available for a period of fifteen days from the date of purchase, as long as the payment has been accepted. Files in digital format are protected and in no case editable. Before purchasing them, it is important that the license of use is read and accepted as a prior step to purchase.
  • Shipping by courier. Products purchased on physical media are shipped by courier. The maximum delivery time in Spanish territory, from the acceptance of the order by AENOR, is:
  •  Approximately seven working days for all standards purchased through the store in paper format.
  • Approximately three days for books purchased through the store. Stocks of paper books are limited and their offer on the website does not imply availability within the indicated period. In the event that the requested book is not available, the customer is notified of the delay in receiving the order, which will be approximately seven working days. 

For the rest of the products that are not on the website, check availability and delivery time at normas@aenor.com.

1. For digital products (PDF, Epub), once delivery has been made by direct download via the website in the Customer Area, you will not have the right to exercise your right of withdrawal.

2. For personalised products on paper, once the purchase has been made, you will not have the right to exercise your right of withdrawal.

3.  For all other paper products, you have the right to withdraw from the sale within 14 calendar days from the date of purchase. Remember that for the return it is essential that the product is in perfect condition, sealed by the packaging and preserving its original packaging. The customer will be responsible for pickup and shipping costs.

The order invoice includes shipping costs, so there is no amount to pay to the courier. Shipping costs are calculated based on both the final destination of the order and the number of products ordered. They include transport and packaging costs. Shipping costs are subject to periodic revisions. Outlet books will have free shipping costs only if the shipment is made in the Peninsula.

Destination Up to three standards and/or publications From three standards and/or publications
Peninsula 7,31€ 8,60€
Balearic Islands 18,04€ 23,34€
Canary Islands, Ceuta and Melilla  18,04€ 23,34€
Europe 59,17€ 80,07€
United States and Canada 70,07€ 96,94€
Rest of the world 91,94€ 115,91€
  • Purchases made by residents of the Member States of the European Union will be subject to the payment of VAT (value added tax).
  • ​​
  • In the case of legal persons and natural persons who, acting as entrepreneurs, are domiciled in a Member State of the European Union (except residents in Spain) and have an intra-community NIF/VAT registered in the VIES census, they will be exempt from paying VAT, being an essential condition the sending of this document by email to normas@aenor.com.
  • Purchases made in a private capacity (natural person), regardless of where they have their residence, will be subject to the payment of VAT.
  • Purchases made by entities in non-EU countries will be exempt from paying VAT, as long as they send the corresponding tax residence document by email to normas@aenor.com.
  • The sale operations will be understood to have been carried out at AENOR's registered office: Génova 6, 28004, Madrid – Spain. 

The contract for the purchase of products through this Website shall be governed by Spanish law. Any dispute arising out of or in connection with the use of the Website or such contract shall be subject to the exclusive jurisdiction of the Courts and Tribunals of Madrid.

Notwithstanding the foregoing, if you are entering into this contract as a consumer under the terms of Royal Decree 1/2007, nothing in this clause shall affect the rights that may be granted to you as such under applicable law.