DIN 32567-3:2025-05
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
| Fecha edición: |
2025-05-01
En Vigor
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| Idiomas disponibles: | Alemán |
| Resumen: | This document specifies methods for tactile topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness. |
| Keywords: | Coating thickness|Contact stylus instruments|Correction value|Deviations|Fine mechanics|Influence factors|Layer thickness measurement|Manufacturing|Manufacturing equipment|Materials|Measurement|Measurement conditions|Measuring techniques|Mechanical properties|Metrology|Microtechnique|Optical measurement|Plant construction|Plant engineering|Production engineering|Production equipment|Semiconductor engineering|Surfaces|Tactile|Workpieces |
| ICS: | 39.020 - Mecánica de precisión |
| CTN: | |
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Reemplazo Normas |
Reemplaza a DIN 32567-3:2014-10 Reemplaza a DIN 32567-3:2024-11 |
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