DIN 50450-9:2021-07
Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography
| Fecha edición: |
2021-07-01
En Vigor
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| Idiomas disponibles: | Alemán |
| Resumen: | This document specifies a method for the determination of the molar ratio of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3> hydrocarbons in gaseous hydrogen chloride from the gas phase. |
| Keywords: | Amounts of substance|Analysis|Carbon dioxide|Carbon monoxide|Carrier gases|Chemical analysis and testing|Chemicals|Content|Determination of content|Doping agents|Doping gases|Gas chromatography|Gases|Hydrocarbons|Hydrogen|Hydrogen chloride|Impurities|Materials|Measurement|Measuring techniques|Nitrogen|Oxygen|Semiconductor engineering|Semiconductor materials|Semiconductor technology|Semiconductors|Testing|Volume|Volume measurement|Water content determination|Water pollution |
| ICS: | 71.100.20 - Gases para aplicación industrial, 29.045 - Materiales semiconductores |
| CTN: | |
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Reemplazo Normas |
Reemplaza a DIN 50450-9:2003-04 Reemplaza a DIN 50450-9:2020-11 |
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