DIN 50989-5:2023-12
Ellipsometry - Part 5: Multiple layers and periodic layers model; Text in German and English
| Fecha edición: |
2023-12-01
En Vigor
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| Idiomas disponibles: | Alemán, Inglés |
| Resumen: | This document uses ellipsometric measurements and their analysis to specify the method for the determination of the total layer thickness of the layer system and the layer thicknesses of individual layers in multilayer and periodic layer systems, and for the determination of their optical or dielectric constants/functions based on the multiple layers and periodic layers model. |
| Keywords: | Coating thickness|Ellipsometry|Layer thickness measurement|Layers|Materials testing|Methods|Methods for measuring|Multiple|Non-invasive|Periodic|Single layers|Testing |
| ICS: | 19.100 - Ensayos no destructivos |
| CTN: | |
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Reemplazo Normas |
Reemplaza a DIN 50989-5:2023-03 |










