DIN 58557-1:2023-03
Production equipment for microsystems - Method for measuring the shape of microlens arrays - Part 1: Single sided measurement of a microlens array
| Fecha edición: |
2023-03-01
En Vigor
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| Idiomas disponibles: | Alemán |
| Resumen: | The document specifies a geometrical measurement method for determining shape, position, geometry and texture parameters of spherical and rotationally symmetrical aspherical microlenses as well as position and geometry parameters of microlens arrays and arrays of microlens arrays by means of tactile and optical pointwise measurements and optical areal measurements. On the one hand, this document can be applied to the inspection of workpieces, on the other hand, the determination of some parameters can be used to characterize the manufacturing process. The microlenses are placed on one or both sides of a substrate or in a substrate, and the microlenses and the substrate can be made of the same material and in the same process. This document specifies procedures for single-sided measurement of microlenses, microlens arrays, and arrays of microlens arrays only. Note: Double-sided referenced measurement is covered in Part 2, which is currently under development. |
| Keywords: | Area measurement|Definitions|Due sided|Geometric|Geometry|Measurement|Measurement conditions|Measuring techniques|Micro systems|Microlens array|Microsystem techniques|Optical|Optical measurement|Position|Production equipment|Shape|Spot metering|Tactile|Testing|Texture|Workpieces |
| ICS: | 31.260 - Optoelectrónica. Equipos láser |
| CTN: | |
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Reemplazo Normas |
Reemplaza a DIN 58557-1:2022-09 |
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