DIN EN ISO 14644-15:2018-03
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017); German version EN ISO 14644-15:2017
| Fecha edición: |
2026-08-01
En Vigor
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|---|---|
| Idiomas disponibles: | Inglés, Alemán |
| Resumen: | This standard provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644-8). Health and safety requirements are not covered by this document and may be covered by legal documents of the specific country. The following issues are excluded: - compatibility with cleaning agents and techniques; - cleanability; - biocontamination; - specific requirements of equipment and materials for processes and products; - design details of equipment. |
| Keywords: | Air|Air pollution|Air purity|Air quality|Airborne dust|Areas|Capability|Categories of purity|Chemical|Chemical properties|Classification|Clean rooms|Cleanliness|Clean-room technology|Concentration|Consistency|Contamination|Definitions|Degree of purity|Determination of content|Documentation|Evaluations|Exterior areas|Fitness for purpose|Impurities|Instructions|Instruments|Light scatter measurement|Materials|Measuring instruments|Methods|Number of particles|Particle analysis|Particle size distribution|Particulate air pollutants|Pure air|Purity|Purity criterion|Purity test|Specification (approval)|Suitability|Surfaces|Testing |
| ICS: | 13.040.35 - Salas limpias y ambientes controlados asociados |
| CTN: | |
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Equivalencia Internacional |
Idéntica EN ISO 14644-15:2017 Idéntica ISO 14644-15:2017 |
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Reemplazo Normas |
Reemplaza a DIN EN ISO 14644-15:2016-05 Es reemplazada por DIN EN ISO 14644-15:2026-08 |
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