DIN EN ISO 14644-15:2026-01
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO/FDIS 14644-15:2025); German and English version prEN ISO 14644-15:2025 / Note: Date of issue 2025-12-05*Intended as replacement for DIN EN ISO 14644-15 (2018-03).
| Fecha edición: |
2026-01-01
En Vigor
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| Idiomas disponibles: | Alemán, Inglés |
| Resumen: | This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for air cleanliness classes by chemical concentration (see ISO 14644-8). The following are outside the scope of this document: health and safety requirements; compatibility with cleaning agents and techniques; cleanability; biocontamination; specific requirements of equipment and materials for processes and products; design details of equipment. |
| Keywords: | Air|Air pollution|Air purity|Air quality|Airborne dust|Areas|Capability|Categories of purity|Chemical|Chemical properties|Classification|Clean rooms|Cleanliness|Clean-room technology|Concentration|Consistency|Contamination|Definitions|Degree of purity|Determination of content|Documentation|Evaluations|Exterior areas|Fitness for purpose|Impurities|Instructions|Instruments|Light scatter measurement|Materials|Measuring instruments|Methods|Number of particles|Particle analysis|Particle size distribution|Particulate air pollutants|Pure air|Purity criterion|Purity test|Specification (approval)|Suitability|Surfaces|Testing |
| ICS: | 13.040.35 - Salas limpias y ambientes controlados asociados |
| CTN: |
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