DIN EN ISO 14644-2:2016-05
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015); German version EN ISO 14644-2:2015
| Fecha edición: |
2016-05-01
En Vigor
|
|---|---|
| Idiomas disponibles: | Inglés, Alemán |
| Resumen: | This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) are addressed in ISO 14644-12. |
| Keywords: | Air pollution|Air purity|Air quality|Airborne dust|Categories of purity|Classification|Classification systems|Clean rooms|Cleanliness|Clean-room technology|Concentration|Concentration of particles|Conformity|Consistency|Definitions|Degree of purity|Determination of content|Determinations|Documentation|Exterior areas|Impurities|Light scatter measurement|Methods|Number of particles|Particle analysis|Particle size|Particle size distribution|Particles|Particulate air pollutants|Pure air|Purity criterion|Purity test|Specification|Specification (approval)|Surveillance (approval)|Testing|Verification |
| ICS: | 13.040.35 - Salas limpias y ambientes controlados asociados |
| CTN: | |
|
Equivalencia Internacional |
Idéntica EN ISO 14644-2:2015 Idéntica ISO 14644-2:2015 |
|
Reemplazo Normas |
Reemplaza a DIN EN ISO 14644-2:2001-02 Reemplaza a DIN EN ISO 14644-2:2014-11 |










