DIN EN ISO 14644-3:2020-08
Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06); German version EN ISO 14644-3:2019
| Fecha edición: |
2020-08-01
En Vigor
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| Idiomas disponibles: | Inglés, Alemán |
| Resumen: | This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational. The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices. |
| Keywords: | Air flow|Air pollution|Air purity|Air quality|Airborne dust|Check lists|Clean rooms|Clean-room technology|Concentration|Concentration of particles|Definitions|Displacement flow|Flow|Measurement|Methods for measuring|Metrology|Number of particles|Test reports|Testing|Testing conditions |
| ICS: | 13.040.35 - Salas limpias y ambientes controlados asociados |
| CTN: | |
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Equivalencia Internacional |
Idéntica EN ISO 14644-3:2019 Idéntica ISO 14644-3:2019 |
|
Reemplazo Normas |
Reemplaza a DIN EN ISO 14644-3:2006-03 Reemplaza a DIN EN ISO 14644-3:2017-02 |
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