DIN EN ISO 25178-603:2023-12
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178-603:2023); German and English version prEN ISO 25178-603:2023 / Note: Date of issue 2023-10-27
| Fecha de anulación: |
2025-12-01
Anulada
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|---|---|
| Idiomas disponibles: | Alemán, Inglés |
| Resumen: | This document describes the design and metrological characteristics of phase shifting interferometry instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document can be applied to profiling measurements as well. |
| Keywords: | Area|Consistency (mechanical property)|Coordinate metrology|Definitions|Design|Finishes|Geometric|Geometrical product specification|Geometry|GPS|Interferometers|Measurement|Measuring instruments|Measuring techniques|Meters|Metrology|Microscopes|Microscopy|Non-contacting|Phase shift|Product specification|Product specifications|Profile|Properties|Stylus instruments|Surface texture|Surfaces|Test techniques|Wear-quantity |
| ICS: | 17.040.40 - Especificación geométrica de productos (GPS), 17.040.20 - Estado de las superficies |
| CTN: | |
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Reemplazo Normas |
Es reemplazada por DIN EN ISO 25178-603:2025-12 |
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