DIN ISO 15632:2022-09
Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA) (ISO 15632:2021)
| Fecha edición: |
2022-09-01
En Vigor
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| Idiomas disponibles: | Inglés, Alemán |
| Resumen: | This document defines the most important quantities that characterize an energy-dispersive X?ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). |
| Keywords: | Analysis methods|Definitions|Electron beams|Energy dispersiv|Features|Ionization|Measuring instruments|Microanalysis|Microbeam analysis|Preamplifiers|Scanning electron microscopes|Semiconductor detectors|Semiconductor devices|Semiconductor diodes|Signal processing|Size|Solids|Spectrometers|X-ray spectrometer|X-ray spectrometry |
| ICS: | 71.040.99 - Otras normas relativas a química analítica |
| CTN: | |
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Equivalencia Internacional |
Idéntica ISO 15632:2021 |
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Reemplazo Normas |
Reemplaza a DIN ISO 15632:2015-11 Reemplaza a DIN ISO 15632:2022-03 |
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