DIN SPEC 1994:2017-02
Testing of materials for semiconductor technology - Determination of anions in weak acids
| Fecha edición: |
2017-02-01
En Vigor
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| Idiomas disponibles: | Alemán |
| Resumen: | This document specifies a method for the determination of the anions chloride, sulfate, nitrate and phosphate in hydrofluoric acid, ammonium fluoride solution and mixtures thereof and in acetic acid in the range of 10 ng/g to 1000 ng/g. |
| Keywords: | Acetic acid|Acids|Anions|Chlorides|Determination|Hydrofluoric acid|Materials|Nitrates|Phosphates|Semiconductor materials|Semiconductor technology|Semiconductors|Sulphates|Technology|Testing |
| ICS: | 29.045 - Materiales semiconductores |
| CTN: | |
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Reemplazo Normas |
Reemplaza a DIN SPEC 1994:2016-07 |
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